3D Reconstruction from Multiple Images Acquired using a Scanning Electron Microscope (SEM) (2001-)
نویسندگان
چکیده
The goal of this work is to develop the methodology for obtaining accurate, threedimensional measurements of object deformation using a scanning electron microscope. Calibration methods are being developed for the SEM that include novel distortion correction approaches. The 3D reconstruction of the specimen surface is computed using multiple views acquired through motion of the SEM specimen’s stage. Since the displacement information obtained from typical SEM stages is not sufficiently accurate for 3D deformation measurements, we are employing a photogrammetric approach to estimate the movements of the sample using specimen images. Using these results, the 3D deformation measurements are computed using a bundle adjustment method that is also common to a range of photogrammetric methods.
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